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CNKI期刊论文0611(1)
知网期刊论文(962)
在“
Elsevier电子期刊
”中,
命中:
290
条,耗时:0.021996 秒
在所有数据库中总计命中:
2,218
条
1.
Pose estimation and calibration using nonlinear capacitance sensor models for micro/
nano
positioning
作者:
Leon Clark
a
;
leon.clark@monash.edu
Author Vitae
;
Bijan Shirinzadeh
a
;
bijan.shirinzadeh@monash.edu
Author Vitae
;
Yanling Tian
b
;
y.tian.1@warwick.ac.uk
Author Vitae
;
Sergej Fatikow
c
;
sergej.fatikow@uni-oldenburg.de
Author Vitae
;
Dawei Zhang
d
;
medzhang@tju.edu.cn
Author Vitae
关键词:
Micro-
nano
positioning
;
Coupled 3DOF motion
;
Capacitive sensor
;
Nonlinearity
;
Calibration
刊名:Sensors and Actuators A: Physical
出版年:2017
2.
Modular kinematics and statics modeling for precision
positioning
stage
作者:
Mingxiang Ling
a
;
b
;
Junyi Cao
a
;
caojy@mail.xjtu.edu.cn
;
Zhou Jiang
a
;
Jing Lin
a
关键词:
Nano
-positioner
;
Compliant mechanism
;
Flexure hinge
;
Displacement amplification ratio
;
Piezoelectric actuator
刊名:Mechanism and Machine Theory
出版年:2017
3.
In-line metrology of
nano
scale features in semiconductor manufacturing systems
作者:
Tsung-Fu Yao
;
Andrew Duenner
;
Michael Cullinan
;
michael.cullinan@austin.utexas.edu" class="auth_mail" title="E-mail the corresponding author
关键词:
Atomic force microscopy
;
MEMS
;
Nano
manufacturing
;
Nano
metrology
;
In-line inspection
;
Nanopositioning
刊名:Precision Engineering
出版年:2017
4.
Six Degree of Freedom Vibration Isolation Platform for In-Line
Nano
-Metrology
作者:
Markus Thier
thier@acin.tuwien.ac.at" class="auth_mail" title="E-mail the corresponding author
;
Rudolf Saathof
;
Andreas Sinn
;
Reinhard Hainisch
;
Georg Schitter
关键词:
Vibration isolation
;
Systems design
;
Nano
-metrology
;
Precision
positioning
systems
刊名:IFAC-PapersOnLine
出版年:2016
5.
Field-directed chaining of
nano
wires: towards transparent electrodes
作者:
Mahshid Sam
;
Nima Moghimian
;
Rustom B. Bhiladvala
;
rustomb@uvic.ca" class="auth_mail" title="E-mail the corresponding author
关键词:
Nano
wire chain
;
Dielectrophoresis
;
Flexible substrate
;
Transparent electrode
刊名:Materials Letters
出版年:2016
6.
A disturbance observer-based adaptive control approach for flexure beam
nano
manipulators
作者:
Yangming Zhang
a
;
Peng Yan
a
;
b
;
PengYan2007@gmail.com" class="auth_mail" title="E-mail the corresponding author
;
Zhen Zhang
c
关键词:
Adaptive control
;
Disturbance observer
;
Tracking control
;
Nano
servo systems
;
Input saturation
刊名:ISA Transactions
出版年:2016
7.
A piezoelectric motor for precision
positioning
applications
作者:
Shine-Tzong Ho
;
stho@kuas.edu.tw" class="auth_mail" title="E-mail the corresponding author
;
Shan-Jay Jan
关键词:
Piezoelectric motor
;
Precision
positioning
;
Piezoelectric actuator
;
Drive method
刊名:Precision Engineering
出版年:2016
8.
Reference-dependent variable-gain control for a
nano
-
positioning
motion system
*
作者:
S.J.L.M. van Loon
*
;
s.j.1.m.v.loon@tue.nl" class="auth_mail" title="E-mail the corresponding author
;
B.G.B. Hunnekens
*
;
b.g.b.hunnekens@tue.nl" class="auth_mail" title="E-mail the corresponding author
;
A.S. Simon
*
;
a.s.simon@tue.nl" class="auth_mail" title="E-mail the corresponding author
;
N. van de Wouw
*
;
n.v.d.wouw@tue.nl" class="auth_mail" title="E-mail the corresponding author
;
W.P.M.H. Heemels
*
;
m.heemels@tue.nl" class="auth_mail" title="E-mail the corresponding author
关键词:
Variable-gain control
;
bandwidth
;
performance
;
experiments
刊名:IFAC-PapersOnLine
出版年:2016
9.
An optimized
nano
-
positioning
stage for Bristol’s Transverse Dynamic Force Microscope
作者:
G. De Silva
*
;
S.C. Burgess
*
;
T. Hatano
*
;
S.G. Khan
*
;
K. Zhang
*
;
T. Nguyen
***
;
G. Herrmann
*
;
G.Herrmann@bris.ac.uk" class="auth_mail" title="E-mail the corresponding author
;
C. Edwards
***
;
C.Edwards@exeter.ac.uk" class="auth_mail" title="E-mail the corresponding author
;
M. Miles
**
关键词:
x-y Stage
;
Force Microscope
;
Micro-/
Nano
systems
;
Multi-Disciplinary Modelling
;
Motion Control
刊名:IFAC-PapersOnLine
出版年:2016
10.
Modelling and Compensation of Thermally Induced
Positioning
Errors in a High Precision Positioning Application
*
作者:
Simon Zü
;
st
*
;
zuest@iwf.mavt.ethz.ch" class="auth_mail" title="E-mail the corresponding author
;
Philip Paul
**
;
paul@swisslitho.ch" class="auth_mail" title="E-mail the corresponding author
;
Lukas Weiss
***
;
weiss@inspire.ethz.ch" class="auth_mail" title="E-mail the corresponding author
;
Konrad Wegener
*
关键词:
State-space model
;
Position estimation
;
Position error
;
Kalman filter
;
Active compensation
刊名:IFAC-PapersOnLine
出版年:2016
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