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CNKI学位论文(74)
知网期刊论文(9)
在“
Elsevier电子期刊
”中,
命中:
11
条,耗时:小于0.01 秒
在所有数据库中总计命中:
83
条
1.
Limitations of patterning thin films by shadow mask high vacuum chemical vapor deposition
作者:
Michael Reinke
;
michael.reinke@empa.ch" class="auth_mail
;
Yury Kuzminykh
;
Patrik
Hoffmann
关键词:
High vacuum chemical vapor deposition
;
Molecular flow regime
;
Shadow mask
;
Thin film patterning
;
Selective area deposition
;
Titanium tetra isopropoxide
;
Reactive sticking coefficient
;
Deposition blocking
刊名:Thin Solid Films
出版年:31 July 2014
2.
High vacuum chemical vapour deposition of oxides:: A review of technique development and precursor selection
作者:
Yury Kuzminykh
;
Ali Dabirian
;
Michael Reinke
;
Patrik
Hoffmann
关键词:
High vacuum chemical vapour deposition
;
Precursor delivery
;
Precursor efficiency
;
Oxides
;
Thin films
刊名:Surface and Coatings Technology
出版年:2013
3.
Precursor adsorption efficiency of titanium tetra isopropoxide in the presence of a barium ¦Â-diketonate precursor
作者:
Michael Reinke
;
Yury Kuzminykh
;
Graziella Mal
;
rino
;
Patrik
Hoffmann
关键词:
High vacuum chemical vapor deposition
;
Precursor efficiency
;
Sticking coefficient
;
Precursor interaction
;
Barium titanate
;
High vacuum chemical vapour deposition
刊名:Surface and Coatings Technology
出版年:2013
4.
Editorial
作者:
Francis Maury
;
Kostadinka Gesheva
;
Patrik
Hoffmann
;
Graziella Mal
;
rino
刊名:Surface and Coatings Technology
出版年:2013
5.
Detection, quantification and identification of fungal extracellular laccases using polyclonal antibody and mass spectrometry
作者:
Harald Kellner
;
Nico Jehmlich
;
Dirk Benndorf
;
Ralf
Hoffmann
;
Martin Rü
;
hl
;
Patrik
J. Hoegger
;
Andrzej Majcherczyk
;
Ursula Kü
;
es
;
Martin von Bergen
;
Franç
;
ois Buscot
关键词:
Copper binding region
;
Basidiomycetes
;
Native-PAGE
;
SDS-PAGE
;
Western blot
;
Tandem mass spectrometry
刊名:Enzyme and Microbial Technology
出版年:2007
6.
Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems
作者:
Ivo Utke
;
Vinzenz Friedli
;
Simone Amorosi
;
Johann Michler and
Patrik
Hoffmann
关键词:
Gas injection system
;
Precursor distribution
;
Effusion
;
Focused electron beam
;
Focused ion beam
;
Deposition
;
Etching
刊名:Microelectronic Engineering
出版年:2006
7.
Electron range effects in focused electron beam induced deposition of 3D nanostructures
作者:
Tristan Bret
;
Ivo Utke
;
Patrik
Hoffmann
;
Maurice Abourida and Pascal Doppelt
关键词:
Focused electron beam induced deposition
;
Electron scattering
;
3D structures
刊名:Microelectronic Engineering
出版年:2006
8.
Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures
作者:
Bret
;
Tristan
;
Utke
;
Ivo
;
Hoffmann
;
Patrik
关键词:
Focused electron beam induced deposition
;
Copper CVD
;
Rapid prototyping
;
Micro- and nanostructures
;
Electron scattering
;
Molecular gas flow
刊名:Microelectronic Engineering
出版年:2005
9.
Characterization of focused electron beam induced carbon deposits from organic precursors
作者:
Bret
;
Tristan
;
Mauron
;
Sebastien
;
Utke
;
Ivo
;
Hoffmann
;
Patrik
关键词:
Focused electron beam induced deposition
;
Amorphous carbon
;
Micro-FTIR
;
Micro-Raman
;
Micro- and nanostructures
刊名:Microelectronic Engineering
出版年:2005
10.
AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS
作者:
Bharat Bhushan
;
Toshi Kasai
;
Gerit Kulik
;
Laura Barbieri and
Patrik
Hoffmann
关键词:
Stiction
;
Friction
;
Wear
;
Self-assembled monolayer
;
Perfluoroalkylsilane
;
Atomic force microscope
刊名:Ultramicroscopy
出版年:2005
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