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内部出版物
在“
Elsevier电子期刊
”中,
命中:
3
条,耗时:0.0109971 秒
1.
A micro-machined differential resonance accelerometer based on
silicon
on
quartz
method
作者:
Cun LiAuthor Vitae
;
Yulong Zhao
;
zhaoyulong@mail.xjtu.edu.cn
Author Vitae
;
Bo LiAuthor Vitae
;
Rongjun ChengAuthor Vitae
;
Dengqiang SunAuthor Vitae
;
Chao HanAuthor Vitae
;
You ZhaoAuthor Vitae
关键词:
Resonance accelerometer
;
Quartz
DETF
;
Silicon
on
quartz
(
SOQ
)
;
Differential structure
刊名:Sensors and Actuators A: Physical
出版年:2017
2.
Ultrathin single-crystalline
silicon
on
quartz
(
SOQ
) by 150 °C wafer bonding
作者:
Tong
;
Q.-Y.
;
Gö
;
sele
;
U.
;
Martini
;
T.
;
Reiche
;
M.
关键词:
Quartz
;
Single-crystalline
silicon
;
Wafer bonding
刊名:Sensors and Actuators A: Physical
出版年:1995
3.
Smart-Cut
®
technology: from 300 mm ultrathin SOI production to advanced engineered substrates
作者:
Maleville
;
Christophe
;
Mazuré
;
Carlos
刊名:Solid-State Electronics
出版年:2004
1
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