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内部出版物
CNKI学位论文(1)
在“
Elsevier电子期刊
”中,
命中:
3
条,耗时:小于0.01 秒
在所有数据库中总计命中:
1
条
1.
Radiation dama
g
e yields across the carbon 1s excitation ed
g
e
作者:
Adam
F
.
G
.
Leontowich
a
;
adam
.
leontowich
@li
g
htsource.ca" class="auth_mail" title="E-mail the correspondin
g
author
;
Adam
P. Hitchcock
a
;
Ray
F
. E
g
erton
b
关键词:
K ed
g
e e
ff
ect
;
Core ed
g
e e
ff
ect
;
Radiation dama
g
e
;
STXM
;
X-ray litho
g
raphy
刊名:Journal o
f
Electron Spectroscopy and Related Phenomena
出版年:2016
2.
Sub-25 nm direct write (maskless) X-ray nanolitho
g
raphy
作者:
Adam
F
.
G
.
Leontowich
a
;
adam
.
leontowich
@c
f
el.de
;
Adam
P. Hitchcock
a
;
Ben Watts
b
;
Jö
;
r
g
Raabe
b
关键词:
Maskless litho
g
raphy
;
STXM
;
F
resnel zone plate
;
X-ray litho
g
raphy
;
Cold development
刊名:Microelectronic En
g
ineerin
g
出版年:2013
3.
Utility o
f
the
G
value and the critical dose to so
f
t X-ray radiation dama
g
e o
f
polyacrylonitrile
作者:
Adam
F
.
G
.
Leontowich
关键词:
STXM
;
Radiation sensitivity
;
Dama
g
e rate
;
NEXA
F
S
;
X-ray litho
g
raphy
;
Irradiated PAN
刊名:Radiation Physics and Chemistry
出版年:2013
1
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作者(3)
按出版年细分(3)
2016年(1)
2013年(2)
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