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内部出版物
CNKI学位论文(9)
知网期刊论文(2)
在“
Elsevier电子期刊
”中,
命中:
4
条,耗时:小于0.01 秒
在所有数据库中总计命中:
11
条
1.
Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems
作者:
Ivo
Utke
;
Vinzenz Friedli
;
Simone Amorosi
;
Johann Michler and Patrik Hoffmann
关键词:
Gas injection system
;
Precursor distribution
;
Effusion
;
Focused electron beam
;
Focused ion beam
;
Deposition
;
Etching
刊名:Microelectronic Engineering
出版年:2006
2.
Electron range effects in focused electron beam induced deposition of 3D nanostructures
作者:
Tristan Bret
;
Ivo
Utke
;
Patrik Hoffmann
;
Maurice Abourida and Pascal Doppelt
关键词:
Focused electron beam induced deposition
;
Electron scattering
;
3D structures
刊名:Microelectronic Engineering
出版年:2006
3.
Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures
作者:
Bret
;
Tristan
;
Utke
;
Ivo
;
Hoffmann
;
Patrik
关键词:
Focused electron beam induced deposition
;
Copper CVD
;
Rapid prototyping
;
Micro- and nanostructures
;
Electron scattering
;
Molecular gas flow
刊名:Microelectronic Engineering
出版年:2005
4.
Characterization of focused electron beam induced carbon deposits from organic precursors
作者:
Bret
;
Tristan
;
Mauron
;
Sebastien
;
Utke
;
Ivo
;
Hoffmann
;
Patrik
关键词:
Focused electron beam induced deposition
;
Amorphous carbon
;
Micro-FTIR
;
Micro-Raman
;
Micro- and nanostructures
刊名:Microelectronic Engineering
出版年:2005
1
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