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内部出版物
知网期刊论文(1)
在“
Elsevier电子期刊
”中,
命中:
3
条,耗时:小于0.01 秒
在所有数据库中总计命中:
1
条
1.
Limitations of patterning thin films by shadow mask high vacuum chemical vapor deposition
作者:
Michael Reinke
;
michael.reinke@empa.ch" class="auth_mail
;
Yury
Kuzminykh
;
Patrik Hoffmann
关键词:
High vacuum chemical vapor deposition
;
Molecular flow regime
;
Shadow mask
;
Thin film patterning
;
Selective area deposition
;
Titanium tetra isopropoxide
;
Reactive sticking coefficient
;
Deposition blocking
刊名:Thin Solid Films
出版年:31 July 2014
2.
High vacuum chemical vapour deposition of oxides:: A review of technique development and precursor selection
作者:
Yury
Kuzminykh
;
Ali Dabirian
;
Michael Reinke
;
Patrik Hoffmann
关键词:
High vacuum chemical vapour deposition
;
Precursor delivery
;
Precursor efficiency
;
Oxides
;
Thin films
刊名:Surface and Coatings Technology
出版年:2013
3.
Precursor adsorption efficiency of titanium tetra isopropoxide in the presence of a barium ¦Â-diketonate precursor
作者:
Michael Reinke
;
Yury
Kuzminykh
;
Graziella Mal
;
rino
;
Patrik Hoffmann
关键词:
High vacuum chemical vapor deposition
;
Precursor efficiency
;
Sticking coefficient
;
Precursor interaction
;
Barium titanate
;
High vacuum chemical vapour deposition
刊名:Surface and Coatings Technology
出版年:2013
1
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2027年及以后(1)
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