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SpringerLink电子期刊(1)
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1.
Improvement of virtual metrology performance by removing metrology noises in a training dataset
作者:
Dongil Kim (1)
Pilsung
Kang (2)
Seung-kyung Lee (1)
Seokho
Kang (1)
Seungyong
Doh (3)
Sungzoon
Cho (1)
1.
Department
of
Industrial
Engineering
;
Seoul National University
;
1 Gwanak ro
;
Gwanak-gu
;
Seoul
;
151-744
;
Republic of Korea
2. IT Management Program
;
International Fusion School
;
Seoul National University of Science and Technology
;
232 Gongneung ro
;
Nowon-gu
;
Seoul
;
139-743
;
Republic of Korea
3. SAMSUNG SDS Co.
;
Ltd.
;
Nongseo-dong
;
Giheung-gu
;
Yongin
;
Gyeonggi-do
;
Republic of Korea
关键词:
Semiconductor manufacturing
;
Virtual metrology
;
Noise identification and removal
;
Novelty detection
刊名:Pattern Analysis & Applications
出版年:2015
1
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2015年(1)
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